SCHOOL
IIT2010 will be preceded by a 3-day school taught by an international instructor corps of experts and each student will receive an updated schoolbook for continued study.
Dates
June 3 to 5, 2010
Place
Miyako Messe(Kyoto International Exhibition Hall), Seminor Room
Floor Map of Miyako Messe is here(FloorMap.pdf)
About 15-20 min. walk from conference hotels
(see "access map").
Textbook
An updated version of the schoolbook, “Ion Implantation: Science and Technology” will be provided to all of the students.
Registration & Fee
For the registration to IIT school, please see REGISTRATION page. The fee for the School is JPY 50,000 and 20,000 for regular and student participants, respectively. In addition, a discount rate is offered to the students to attend both IIT School and Conference.(See "REGISTRATION")
Lectures and Contents:
Thursday June 3
| 09:00-10:30 | History of Electronics |
James Ziegler |
|---|---|---|
| 10:30-11:00 | Break |
|
| 11:00-12:00 | Introduction to Ion Implantation |
James Ziegler |
| 12:00-13:00 | Lunch |
|
| 13:00-14:30 | Review of CMOS Devices |
Leonard Rubin |
| 14:30-15:00 | Break |
|
| 15:00-17:00 | The Problems of Shallow Junctions |
Michael Current |
| 17:15-19:00 | (Reception*) |
Friday June 4 (Science)
| 09:00-10:00 | Ion Implantation Damage |
Kevin S. Jones |
|---|---|---|
| 10:00-10:30 | Break |
|
| 10:30-12:00 | Ion Implantation Annealing | Kevin S. Jones |
| 12:00-13:00 | Lunch |
|
| 13:00-14:30 | Cluster Ion Beam Implantation | Isao Yamada |
| 14:30-15:00 | Break |
|
| 15:00-16:30 | Plasma Immersion Ion Implantation | Susan Felch |
Friday June 4 (Technology)
| 09:00-10:00 | Implanter Concepts |
David Chivers |
|---|---|---|
| 10:00-10:30 | Break |
|
| 10:30-12:00 | Ion Sources – Concepts | Anthony Renau |
| 12:00-13:00 | Lunch |
|
| 13:00-14:00 | Ion Sources – Repair and Maintenance | Anthony Renau |
| 14:00-14:30 | Break |
|
| 14:30-15:30 | End-Station Problems | T. C. Smith |
| 15:30-17:30 | Implanter Safety | Stephen Roberge |
Saturday June 5
| 09:00-10:00 | Future of CMOS on SOI |
Devendra Sadana |
|---|---|---|
| 10:00-10:30 | Break |
|
| 10:30-11:30 | New CMOS Devices and Future Manufacturing Processes |
Devendra Sadana |
| 11:30-12:30 | Variability Issues and The New Possibility of Ion Implantation |
Tohru Mogami |
* Reception is free. Light food & beer will be served.
(School_Schedule.pdf )